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Impact of ultrapure water in Dongguan purification project


The clean room of Dongguan purification project refers to the removal of pollutants such as particulates, harmful air, and bacteria in a certain range of air, and the indoor temperature, cleanliness, indoor pressure, air velocity and air distribution, noise and vibration And lighting, static control within a certain range of requirements, and given a specially designed room. A sterile room is usually a small room in a microbiology laboratory. Can be built from sheet and glass.
Because the work content in clean rooms mostly has fine requirements, and they are all closed houses, there has always been a high demand for lighting. Here it is necessary to explain the lighting method of windowless clean room:
This refers to the lighting set up to increase the illuminance of a specified place, such as a work point. However, indoor lighting is generally not used by local lighting alone.
With the change in the design rules of semiconductor ICs from 1.5 to 0.25 μm, the water quality of ultrapure water is corresponding to its theoretical limit, except for TOC (total organic carbon), DO (dissolved oxygen), Si02, Both particulates and ionic impurities are reduced by 2-4 orders of magnitude.
Dongguan purification project In the current water treatment, the difficulty of each impurity treatment is TOC, SiO2, DO, and resistivity in order, and the resistivity of 18MΩ · cm (25 ° C) is currently relatively easy to reach. As the TOC content is high, the defect density in the gate oxide film, especially the thin gate oxide film, will increase. Therefore, the thinner the gate, the lower the TOC. Moreover, in the current development trend of IC technology, the gate film on the chip is getting thinner and thinner. TOC is the biggest difficulty at present and in the future, so it has become the symbol and focus of today's ultrapure water quality.
Dongguan Purification Project It is understood that in the American chip factories, the loss of more than 50% of the yield is caused by chemical impurities and particulate pollution; in Japanese factories, the proportion of poor electrical characteristics of the devices due to particulate pollution has risen from 70% of 2 μm to More than 90% of the 0.8μm ultra-large-scale IC, it can be seen that the narrower the IC line width, the more prominent its harm. Correspondingly, the importance of ultrapure water in IC packaging is obvious.
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