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Environmental control in clean room


Environmental control of dust-free workshops Environmental control requirements vary with the application. Therefore, the buyer should specify which locust standard is important when formulating the technical specifications of the clean room. The same requirements given in the wooden appendix are not exhaustive and should be supplemented as required.

  Environmental system design houses should consider the following issues:

选用的污染摔制概念: a) The selected pollution control concept:

产舳质量要求: b) Production quality requirements:

资本和运作成奉(有效使用周期成奉计算): c) Capital and operational contributions (effective period calculations):

节能; d) energy saving;

      安全性: e) Security:

人的健康和舒适; g) 设备和工艺过私的需求和限制; h) 可靠性、易于使用和维护; i) 环境问题(如废物的处理和包装): f) human health and comfort; g) the needs and restrictions of equipment and craftsmanship; h) reliability, ease of use and maintenance; i) environmental issues (such as waste disposal and packaging):

规程要求。 j) regulatory requirements.

温度和湿度 F.2.1 为保证无尘车间的性能, J, 依特定的工艺要求规定温度 (CO) 和相对湿度( % 饱和)的没定值和变化限定范围。 F.2 Temperature and humidity F.2.1 In order to ensure the performance of the clean room, J, specify the uncertain value and change range of temperature (CO) and relative humidity ( % saturation) according to specific process requirements .

F. 应为下述各项提供温度控制: 2.2 Temperature control shall be provided for:

艺; b) 设备和材料: a) T art; b) Equipment and materials:

穿着与规定的无尘车间等级相适的洁净工作服的人员需要的稳定条件。 c) Stable conditions required by personnel wearing clean work clothes suitable for the specified clean room class.

,照明的热负荷高而稳定:人的负荷各小相同, T 艺操作产生的热(如热封、波峰焊、焊接、热处理和加热压力容器)通常是离而有变化。 In general case F , the heat load of the lighting is high and stable: the load of each person is small, and the heat generated by the T art operation (such as heat sealing, wave soldering, welding, heat treatment and heating of the pressure vessel) usually varies.

污染控制要求的窄气量很大,这有利于以适宜的温度控制系统的反应速度调整内部的热增益。 F.23 Pollution control requires a large amount of narrow gas, which is conducive to adjusting the internal thermal gain with the response speed of a suitable temperature control system. However, it is necessary to analyze the area where the heat dissipation equipment is concentrated and the form of the air supply to determine the qualified boundaries of the induced temperature change and pollution control.

应为下述各项提供湿度控制: F.2.4 Humidity control shall be provided for:

制造工艺: a) Manufacturing process:

设备和材料: b) Equipment and materials:

减少静电荷数日; d) 与上述温度控制有关的人员的舒适。 c) reduce electrostatic charge for several days; d) comfort of personnel related to the above temperature control.

无尘车间设施中,外部情况(如天气的变化)对湿度控制的影响大于窄间内产生的水分的影响。 F.2.5 In dust-free workshop facilities, the influence of external conditions (such as weather changes) on humidity control is greater than the influence of moisture generated in narrow spaces. L4-II 艺中有气化,应该把其限制存有通风的围护结构中。 If there is gasification in the clean room facility L4-II , it should be stored in a ventilated enclosure. Precautions should be taken to control static effects. T 35% 的相对湿度 (R H ) Some manufacturing processes (such as true-rate tube manufacturing and production) require a low relative humidity ( R.H. ) of 35% T. E 巾所指,选材时还应考虑减少静电效应。 As indicated in Appendix E , the selection of materials should also consider reducing static effects. In a limited space, if the humidity is low, the electrostatic charge will be higher than the area with higher humidity.

特定的设施应该明确规定人员舒适要求的温度和湿度。 F2.6 Specific facilities should clearly specify the temperature and humidity required for personnel comfort. 般相对湿度在 <65%R 'General relative humidity is <65% R. H->

的范围内。 Within 30% RH . 1 艺和人员的要求。 Beyond this range, appropriate measures should be considered to meet the requirements of arts and personnel. 巾给出 J ,如何根据无尘车间工作服调节温度。 IS0 7730 towel gives J , how to adjust the temperature according to the work clothes of the clean room.

应该规定出要求测量温度和相对湿度的位置。 F2.7 should specify the locations where temperature and relative humidity are to be measured.

如果系统要求在室外使用,应该规定其室外条件,并考虑需要的 T 作方式。 F2.8 If the system requires outdoor use, its outdoor conditions should be specified, and the required T operation method should be considered .

对 洁净室内产生的热量和湿气量,来源的位置和动态 = 变化性质都戍该加以规定。 F.2.9 The amount of heat and moisture generated in the clean room, the location of the source and the dynamic nature of the change should not be specified.

照明 lr3.1 应该规定出设施各个部分要求的照明等级和均匀性,以及评定方法。 F3 lighting lr3.1 should specify the lighting level and uniformity required by each part of the facility, as well as the evaluation method.

F. 照明的色彩 i:r 染对人员的舒适及很多情况下对 T 艺,特别是感光工艺有很人影响,买方应该对此加以规定。 2 The color i: r of the lighting has a great influence on the comfort of the personnel and in many cases on the T art, especially the photosensitive process, and the buyer should specify this.

照明系统虚该符合无尘车间的有效使用要求。 F.3.3 The lighting system should meet the requirements for effective use of the clean room. 域。 The lighting assembly should be free of contaminated Ix domains. Consideration should be given to using sealed or flush fittings. In unidirectional flow applications, the design and location of the fittings and associated diffusers should be minimized to eliminate turbulence. The lighting assembly should be in good use, and it will not damage the integrity of the clean room, nor will it produce excessive pollution. T 作角度考虑所在区内的眩光问题。 The glare problem in the area should be considered from the perspective of T.

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