Project CategoryMain project classification
Dongguan dust-free workshop tests dust particles
Air particulate pollution is a major source of pollution in the production and processing processes of many industries. Accurate evaluation of Dongguan clean room air purification has become a requirement for production and product testing in many industries. For example, in the electronics industry and chip manufacturing industry, the deposition of tiny particles in the gas will cause even worse electrical damage. Especially in recent years, the chip line width has reached micron and sub-micron level, which puts forward higher requirements for air purification in Dongguan clean room . In addition, in modern medicine, pharmaceuticals, and biological engineering, the "GMP of Good Manufacturing Practices for Drugs" formulated and implemented by countries around the world, including China, also puts emphasis on the cleanliness of particles in the air during the production of drugs. Especially with the implementation of the "Outline of the National Medium- and Long-Term Scientific and Technological Development Plan", core electronic devices, high-end general-purpose chips, and major new drug creations, which are 16 major development projects, will develop rapidly. Monitoring has become more urgent.
It is estimated that China's existing dust particle counter manufacturers have more than 10 Dongguan dust-free workshops, and the number of Taiwan-used pieces should be no less than 30,000. These manufacturers and users have a strong demand for calibration and testing. To ensure the accuracy of the measurement of dust particles in the air, it is first necessary to ensure that the dust particle counter itself is accurate and traceable. This study completed by the China Metrology Institute has established a standard particle counter calibration device, which achieves the verification and calibration of the standard particle counter's particle count indication error, particle size relative setting error, and particle size measurement resolution calibration items. The uncertainty is 6.0% (k = 2), which is better than the technical level of the same metrology and calibration device abroad. At the same time, they also established a working-level particle counter calibration device to achieve effective calibration of working-level (laboratory, portable) particle counter particle count indication errors.
In the study, we adopted the international advanced 'Laser Particle Counter-Condensed Nodule Particle Counter-Aerosol Electrometer (or Scanning Electron Microscope)' step-by-step source tracing method to trace the particle count value of the standard particle counter to the national current Standard and traditional microscopic counting methods ensure traceability and accuracy of particle counting.